Czech Berdych, who next faces eight-times champion Rafa Nadal or world number one Novak Djokovic, breezed through the opening set without facing a single break point.
Monfils, who beat Roger Federer and Grigor Dimitrov en route to the semi-finals in the European claycourt season's opening tournament, offered more resistance in the second set but made too many unforced errors.
Berdych now has a 6-1 record against 14th-seeded Frenchman Monfils who came back from an injury absence late last month.

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