He will visit Assi Ghat to inspect the progress of cleanliness drive launched by him last month, sources said here on Wednesday.
Narendra Modi, on November 8, had wielded a spade to remove silt deposited at the Assi Ghat along the banks of the Ganga as part of his 'Swachh Bharat' campaign.
The Prime Minister had worked through an uneven muddy track to reach a makeshift stage where five priests were waiting for him to assist him in a special Ganga puja.
Modi will also visit Banaras Hindu University (BHU) where he will lay the foundation stone for an inter-university centre for teachers' education to be named after Madan Mohan Malviya.
The Centre is expected to function as an autonomous body, the details of which will be spelt out during the Prime Minister's visit to the campus. At the BHU, Modi is also expected to launch Varanasi Mahotsav.
While in Varanasi, the Prime Minister will also lay the foundation stone for expansion of the Diesel Locomotive Works factory.
Foundation stone for expansion of a stadium in the holy city will also be laid.